Patent Assignment
Reel/Frame 038443/0858
Assignment of Assignor's Interest
Recorded: 2016-05-03
Pages: 3
Assignors
MOHANTY, NIHAR
Executed: 2016-04-28
LIU, ERIC CHIH-FANG
Executed: 2016-04-28
FRANKE, ELLIOTT
Executed: 2016-04-28
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Processing Photoresist Materials and Structures