Patent Assignment
Reel/Frame 038489/0895
Assignment of Assignor's Interest
Recorded: 2016-05-06
Pages: 6
Assignors
KUMAGAI, TOMOYA
Executed: 2015-10-21
UENO, NAOHISA
Executed: 2015-10-21
SUGAWARA, MAI
Executed: 2015-10-21
Assignee
TOKYO OHKA KOGYO CO., LTD.
150 NAKAMARUKO, NAKAHARA-KU, KANAGAWA, KAWASAKI-SHI, 211-0012, JAPAN
Covered Property
(1)
Cleaning Liquid for Lithography and Method for Cleaning Substrate