Patent Assignment
Reel/Frame 038764/0472
Assignment of Assignor's Interest
Recorded: 2016-06-01
Pages: 6
Assignors
ZHOU, QINGJUN
Executed: 2016-04-06
KO, JUNGMIN
Executed: 2016-04-06
CHOI, TOM
Executed: 2016-04-07
KANG, SEAN
Executed: 2016-04-11
PENDER, JEREMIAH
Executed: 2016-04-08
NEMANI, SRINIVAS D.
Executed: 2016-04-11
ZHANG, YING
Executed: 2016-04-07
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Cyclic Spacer Etching Process with Improved Profile Control