Patent Assignment
Reel/Frame 038809/0171
Assignment of Assignor's Interest
Recorded: 2016-06-05
Pages: 3
Assignors
CHEN, CHIH HUNG
Executed: 2016-05-10
HSU, CHIA-JUNG
Executed: 2016-05-10
LIN, YI-AN
Executed: 2016-05-10
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6,, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Backside Polisher with Dry Frontside Design and Method Using the Same