Patent Assignment
Reel/Frame 038912/0333
Assignment of Assignor's Interest
Recorded: 2016-06-14
Pages: 3
Assignors
PAN, WAN-CHUN
Executed: 2016-05-31
HONG, WILLIAM WEILUN
Executed: 2016-05-31
CHEN, YING-TSUNG
Executed: 2016-05-31
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6,, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Methods for Reducing Scratch Defects in Chemical Mechanical Planarization