Patent Assignment
Reel/Frame 039060/0689
Assignment of Assignor's Interest
Recorded: 2016-06-30
Pages: 4
Assignors
YANG, WENBING
Executed: 2016-06-03
OHBA, TOMIHITO
Executed: 2016-06-06
TAN, SAMANTHA
Executed: 2016-06-07
KANARIK, KEREN JACOBS
Executed: 2016-06-05
MARKS, JEFFREY
Executed: 2016-06-04
NOJIRI, KAZUO
Executed: 2016-06-07
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Atomic Layer Etching of Gan and Other Iii-V Materials