Patent Assignment
Reel/Frame 039166/0697
Assignment of Assignor's Interest
Recorded: 2016-07-15
Pages: 8
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Focus Ring