Patent Assignment
Reel/Frame 039305/0481
Assignment of Assignor's Interest
Recorded: 2016-08-01
Pages: 5
Assignors
GUPTA, RAHUL
Executed: 2013-11-01
PALLEM, VENKATESWARA R.
Executed: 2013-12-10
SURLA, VIJAY
Executed: 2013-12-10
ANDERSON, CURTIS
Executed: 2013-10-31
Assignee
AMERICAN AIR LIQUIDE, INC.
46409 LANDING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method of Etching Semiconductor Structures with Etch Gas
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.