Patent Assignment
Reel/Frame 039317/0544
Assignment of Assignor's Interest
Recorded: 2016-08-02
Pages: 3
Assignors
SWAMINATHAN, SHANKAR
Executed: 2016-07-22
PASQUALE, FRANK L.
Executed: 2016-07-25
LAVOIE, ADRIEN
Executed: 2016-07-29
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Plasma Assisted Atomic Layer Deposition of Multi-Layer Films for Patterning Applications