Patent Assignment
Reel/Frame 039457/0453
Assignment of Assignor's Interest
Recorded: 2016-08-16
Pages: 3
Assignor
BOGNER, BERNHARD
Executed: 2016-08-08
Assignee
SUSS MICROTEC LITHOGRAPHY GMBH
SCHLEISSHEIMER STRASSE 90, GARCHING, 85748, GERMANY
Covered Property
(1)
Method and Apparatus for Preventing the Deformation of a Substrate Supported at its Edge Area