Patent Assignment
Reel/Frame 039469/0838
Assignment of Assignor's Interest
Recorded: 2016-08-17
Pages: 5
Assignors
CHOU, TZU-TING
Executed: 2016-07-26
LU, CHI-LUN
Executed: 2016-07-26
LIN, KUAN-WEN
Executed: 2016-07-20
CHIN, SHENG-CHI
Executed: 2016-07-29
HSU, TING-HAO
Executed: 2016-07-27
LIU, CHUNG-HSUAN
Executed: 2016-07-16
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6,, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
System and Method for Localized EUV Pellicle Glue Removal