Patent Assignment
Reel/Frame 039582/0854
Assignment of Assignor's Interest
Recorded: 2016-08-30
Pages: 3
Assignors
SHISHIDO, HIROAKI
Executed: 2016-08-12
NOZAWA, OSAMU
Executed: 2016-08-12
UCHIDA, TAKASHI
Executed: 2016-08-12
Assignee
HOYA CORPORATION
6-10-1 NISHI-SHINJUKU, SHINJUKU-KU, TOKYO, 160-8347, JAPAN
Covered Property
(1)
Mask Blank, Method of Manufacturing Phase Shift Mask, Phase Shift Mask, and Method of Manufacturing Semiconductor Device