Patent Assignment
Reel/Frame 039719/0377
Assignment of Assignor's Interest
Recorded: 2016-09-13
Pages: 6
Assignor
BROOKS AUTOMATION, INC.
Executed: 2010-02-12
Assignee
MURATA MACHINERY LTD.
136, TAKEDA MUKAISHIRO-CHO FUSHIMI-KU, KYOTO, 612-8686, JAPAN
Covered Property
(1)
Automated Material Handling System for Semiconductor Manufacturing Based on a Combination of Vertical Carousels and Overhead Hoists