Patent Assignment
Reel/Frame 039719/0734
Assignment of Assignor's Interest
Recorded: 2016-09-13
Pages: 7
Assignor
BROOKS AUTOMATION, INC.
Executed: 2010-02-02
Assignee
MURATA MACHINERY LTD.
3 MINAMI OCHIAI-CHO, KISSHOIN, MINAMI-KU, KYOTO-SHI, KYOTO, 601-8326, JAPAN
Covered Property
(1)
Automated Material Handling System for Semiconductor Manufacturing Based on a Combination of Vertical Carousels and Overhead Hoists