Patent Assignment
Reel/Frame 039757/0586
Assignment of Assignor's Interest
Recorded: 2016-09-15
Pages: 3
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Mask for Euv Lithography, Euv Lithography System and Method for Optimising the Imaging of a Mask
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.