Patent Assignment
Reel/Frame 039781/0875
Assignment of Assignor's Interest
Recorded: 2016-09-19
Pages: 3
Assignor
VAN HEUMEN, MARTIJN PETRUS CHRISTIANUS
Executed: 2013-12-17
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Radiation Source, Metrology Apparatus, Lithographic System and Device Manufacturing Method