Patent Assignment
Reel/Frame 039909/0794
Assignment of Assignor's Interest
Recorded: 2016-09-30
Pages: 6
Assignors
ENKISCH, HARTMUT
Executed: 2016-07-05
PAUL, HANS-JOCHEN
Executed: 2016-07-11
SCHICKETANZ, THOMAS
Executed: 2016-07-19
DIER, OLIVER
Executed: 2016-07-05
WEBER, JOERN
Executed: 2016-07-20
GRASSE, CHRISTIAN
Executed: 2016-07-05
WINTER, RALF
Executed: 2016-07-05
STROBEL, SEBASTIAN
Executed: 2016-07-11
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Reflective Optical Element, and Optical System of a Microlithographic Projection Exposure Apparatus