Patent Assignment
Reel/Frame 039933/0180
Assignment of Assignor's Interest
Recorded: 2016-10-04
Pages: 4
Assignors
NAGAMI, KOICHI
Executed: 2016-09-01
UMEHARA, NAOYUKI
Executed: 2016-09-01
YAMADA, NORIKAZU
Executed: 2016-09-01
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Impedance Matching of Plasma Processing Apparatus