Assignment of Assignor's Interest

Recorded: 2016-10-12 Pages: 4

Assignors

AN, JONG HWAN

Executed: 2016-10-11

NAM, SHIN-WOO

Executed: 2016-10-11

LEE, HONG WON

Executed: 2016-10-11

SHIM, JAE BAK

Executed: 2016-10-11

Assignee

SEMES CO., LTD.

77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, KOREA, REPUBLIC OF

Covered Property (1)

Apparatus for Monitoring Pulsed High-Frequency Power and Substrate Processing Apparatus Including the Same

Application: 15/291,193 →

Publication: US 2017/0103871