Patent Assignment
Reel/Frame 040022/0151
Assignment of Assignor's Interest
Recorded: 2016-10-14
Pages: 3
Assignor
KWAN, YIM-BUN PATRICK
Executed: 2016-10-11
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Imaging Arrangement with Multiple Metrology Support Units