Patent Assignment
Reel/Frame 040100/0373
Assignment of Assignor's Interest
Recorded: 2016-10-24
Pages: 4
Assignors
WU, WEN-LI
Executed: 2016-05-12
CHIEN, YUN-SAN
Executed: 2016-05-12
FU, WEI-EN
Executed: 2016-05-15
FERNG, SHYH-SHIN
Executed: 2016-05-15
LIN, YI-HUNG
Executed: 2016-05-01
Assignees
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
NO. 195, SEC. 4, CHUNG-HSING RD., CHU-TUNG, HSINCHU, TAIWAN
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
X-Ray Reflectometry Apparatus for Samples with a Miniscule Measurement Area and a Thickness in Nanometers and Method Thereof
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.