Patent Assignment
Reel/Frame 040138/0001
Assignment of Assignor's Interest
Recorded: 2016-10-26
Pages: 5
Assignors
HSIAO, TSAI-FU
Executed: 2016-05-16
HSU, KUANG-YUAN
Executed: 2016-05-16
JENG, PEI-REN
Executed: 2016-05-16
LEE, TZE-LIANG
Executed: 2016-05-16
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8 LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Apparatus for Manufacturing a Thin Film and a Method Therefor