Patent Assignment
Reel/Frame 040154/0005
Assignment of Assignor's Interest
Recorded: 2016-10-27
Pages: 5
Assignors
CHENG, KANGGUO
Executed: 2016-10-25
MIAO, XIN
Executed: 2016-10-27
XU, WENYU
Executed: 2016-10-25
ZHANG, CHEN
Executed: 2016-10-25
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Fabrication of Vertical Fin Field Effect Transistors Having Top Air Spacers and a Self-Aligned Top Junction