Patent Assignment
Reel/Frame 040219/0363
Assignment of Assignor's Interest
Recorded: 2016-11-04
Pages: 8
Assignors
ZENG, SI-HAN
Executed: 2016-05-16
PENG, YUE-LIN
Executed: 2016-05-16
FANG, JEN-YU
Executed: 2016-05-16
DEN BOEF, ARIE JEFFREY
Executed: 2016-04-22
STRAAIJER, ALEXANDER
Executed: 2016-05-10
HUNG, CHING-YI
Executed: 2016-05-18
WARNAAR, PATRICK
Executed: 2016-04-18
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Metrology Method and Apparatus, Computer Program and Lithographic System