Patent Assignment
Reel/Frame 040388/0900
Assignment of Assignor's Interest
Recorded: 2016-11-21
Pages: 6
Assignors
HEMBACHER, STEFAN
Executed: 2008-03-12
GELLRICH, BERNHARD
Executed: 2008-03-06
KUGLER, JENS
Executed: 2008-03-06
BLEIDISTEL, SASCHA
Executed: 2008-03-07
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Imaging Device and Method for Reducing Dynamic Fluctuations in Pressure Difference
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.