Patent Assignment
Reel/Frame 040653/0902
Assignment of Assignor's Interest
Recorded: 2016-12-18
Pages: 6
Assignors
FU, JIYOU
Executed: 2016-09-25
PANDEV, STILIAN IVANOV
Executed: 2016-09-20
PETERLINZ, KEVIN A.
Executed: 2016-11-03
SAPIENS, NOAM
Executed: 2016-09-27
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Spectroscopic Beam Profile Overlay Metrology