Patent Assignment
Reel/Frame 040890/0088
Assignment of Assignor's Interest
Recorded: 2017-01-09
Pages: 4
Assignors
HAO, FANGLI
Executed: 2017-01-04
FU, YUEHONG
Executed: 2016-12-16
CHEN, ZHIGANG
Executed: 2016-12-16
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Substrate Support with Improved Process Uniformity