Patent Assignment
Reel/Frame 041152/0555
Assignment of Assignor's Interest
Recorded: 2016-12-21
Pages: 5
Assignors
ISHIZAKA, TADAHIRO
Executed: 2016-12-12
KOIZUMI, MASAKI
Executed: 2016-12-12
SANO, MASAKI
Executed: 2016-12-12
HONG, SEOKHYOUNG
Executed: 2016-12-12
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Lower Electrode of Dram Capacitor and Manufacturing Method Thereof