Patent Assignment
Reel/Frame 041363/0361
Assignment of Assignor's Interest
Recorded: 2017-02-23
Pages: 3
Assignors
LIU, CHIN-YI
Executed: 2016-11-29
SCHAEFER, DAVID
Executed: 2017-02-23
MAROHL, DAN
Executed: 2016-11-30
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Universal Non-Invasive Chamber Impedance Measurement System and Associated Methods