Patent Assignment
Reel/Frame 041507/0470
Assignment of Assignor's Interest
Recorded: 2017-03-08
Pages: 5
Assignors
HSU, DUAN-FU
Executed: 2012-01-03
CHEN, LUOQI
Executed: 2011-12-15
FENG, HANYING
Executed: 2011-12-15
HOWELL, RAFAEL C.
Executed: 2012-01-02
ZHOU, XINJIAN
Executed: 2012-01-02
CHEN, YI-FAN
Executed: 2012-01-03
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Optimization Flows of Source, Mask and Projection Optics