Patent Assignment
Reel/Frame 041625/0439
Assignment of Assignor's Interest
Recorded: 2017-03-17
Pages: 6
Assignors
HINNEN, PAUL CHRISTIAAN
Executed: 2016-01-12
MATHIJSSEN, SIMON GIJSBERT JOSEPHUS
Executed: 2016-01-06
GOOSEN, MAIKEL ROBERT
Executed: 2016-01-08
VAN DER SCHAAR, MAURITS
Executed: 2016-01-11
DEN BOEF, ARIE JEFFREY
Executed: 2016-01-06
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Methods and Patterning Devices and Apparatuses for Measuring Focus Performance of a Lithographic Apparatus, Device Manufacturing Method