Patent Assignment
Reel/Frame 042132/0094
Assignment of Assignor's Interest
Recorded: 2017-04-24
Pages: 2
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods and Apparatus for Forming Smooth and Conformal Cobalt Film by Atomic Layer Deposition