Patent Assignment
Reel/Frame 042148/0101
Assignment of Assignor's Interest
Recorded: 2017-04-26
Pages: 4
Assignor
NAGAMI, KOICHI
Executed: 2017-03-27
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Method