Patent Assignment
Reel/Frame 042198/0752
Assignment of Assignor's Interest
Recorded: 2017-05-02
Pages: 3
Assignors
OKADA, TETSUJI
Executed: 2017-01-31
ASANO, TOSIYA
Executed: 2017-01-31
MARUYAMA, NAOKI
Executed: 2017-01-31
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Lithography Apparatus, and Method of Manufacturing Article