Patent Assignment
Reel/Frame 042447/0237
Assignment of Assignor's Interest
Recorded: 2017-05-22
Pages: 3
Assignors
WARNAAR, PATRICK
Executed: 2016-03-07
HASTINGS, SIMON PHILIP SPENCER
Executed: 2016-03-03
DA COSTA ASSAFRAO, ALBERTO
Executed: 2016-03-03
MACHT, LUKASZ JERZY
Executed: 2016-03-02
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method