Patent Assignment
Reel/Frame 042692/0522
Assignment of Assignor's Interest
Recorded: 2017-06-13
Pages: 6
Assignors
ARTEMIEV, NIKOLAY
Executed: 2017-05-05
VIATELLA, JOHN WADE
Executed: 2017-04-26
BYKANOV, ALEXANDER
Executed: 2017-05-10
DI REGOLO, JOSEPH A.
Executed: 2017-06-07
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Beam Shaping Slit For Small Spot Size Transmission Small Angle X-Ray Scatterometry