Patent Assignment
Reel/Frame 042733/0090
Assignment of Assignor's Interest
Recorded: 2017-06-16
Pages: 3
Assignors
KUDO, JIN
Executed: 2017-06-07
TAKAYAMA, WATARU
Executed: 2017-06-07
TOMURA, MAJU
Executed: 2017-06-07
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Process Method