Patent Assignment
Reel/Frame 043082/0849
Assignment of Assignor's Interest
Recorded: 2017-07-24
Pages: 4
Assignor
BREUER, JOHN
Executed: 2017-07-13
Assignee
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FÜR HALBLEITERPRÜFTECHNIK MBH
AMMERTHALSTR. 20, HEIMSTETTEN, D-85551, GERMANY
Covered Property
(1)
Aberration-Corrected Multibeam Source, Charged Particle Beam Device and Method of Imaging or Illuminating a Specimen with an Array of Primary Charged Particle Beamlets