Patent Assignment
Reel/Frame 043246/0646
Assignment of Assignor's Interest
Recorded: 2017-08-09
Pages: 2
Assignor
GOTTSCHO, RICHARD ALAN
Executed: 2017-08-08
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods for Monitoring Plasma Processing Systems for Advanced Process and Tool Control