Patent Assignment
Reel/Frame 043247/0113
Assignment of Assignor's Interest
Recorded: 2017-08-09
Pages: 8
Assignors
SAROV, YANKO
Executed: 2017-07-07
HOLZ, MARKUS
Executed: 2017-07-06
HAACKER, FABIAN
Executed: 2017-08-02
WENGLER, MARK CHRISTOF
Executed: 2017-08-02
HAUF, MARKUS
Executed: 2017-07-10
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Mirror Device