Patent Assignment
Reel/Frame 043613/0711
Assignment of Assignor's Interest
Recorded: 2017-09-18
Pages: 8
Assignors
CHANG, KUEI-SUNG
Executed: 2017-08-14
LAI, FEI-LUNG
Executed: 2017-08-04
TSAI, SHANG-YING
Executed: 2017-08-04
HSIEH, CHENG YU
Executed: 2017-08-04
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method of Stiction Prevention by Patterned Anti-Stiction Layer