Patent Assignment
Reel/Frame 043775/0635
Assignment of Assignor's Interest
Recorded: 2017-10-04
Pages: 2
Assignor
FAN, CHE-LUN
Executed: 2017-09-22
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Etching Solution Recycling System and Method for Wafer Etching Apparatus