Patent Assignment
Reel/Frame 043849/0983
Assignment of Assignor's Interest
Recorded: 2017-10-12
Pages: 2
Assignee
SHIBAURA MECHATRONICS CORPORATION
2-5-1, KASAMA, SAKAE-KU,, YOKOHAMA-SHI, KANAGAWA, 247-8610, JAPAN
Covered Property
(1)
Processing Liquid Generator and Substrate Processing Apparatus Using the Same