Patent Assignment
Reel/Frame 043911/0369
Assignment of Assignor's Interest
Recorded: 2017-10-20
Pages: 3
Assignor
MIURA, SHIGEHIRO
Executed: 2016-02-15
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method