Patent Assignment
Reel/Frame 043985/0096
Assignment of Assignor's Interest
Recorded: 2017-10-30
Pages: 4
Assignor
SHIBAZAKI, YUICHI
Executed: 2017-09-22
Assignee
NIKON CORPORATION
15-3, KONAN 2-CHOME, MINATO-KU, TOKYO, 108-6290, JAPAN
Covered Property
(1)
Measurement Device, Lithography System and Exposure Apparatus, and Control Method, Overlay Measurement Method and Device Manufacturing Method