Patent Assignment
Reel/Frame 044577/0157
Assignment of Assignor's Interest
Recorded: 2018-01-09
Pages: 9
Assignors
OKADA, KANA
Executed: 2017-10-31
MAKINOSHIMA, TAKASHI
Executed: 2017-10-31
ECHIGO, MASATOSHI
Executed: 2017-10-27
HIGASHIHARA, GO
Executed: 2017-11-09
OKOSHI, ATSUSHI
Executed: 2017-11-09
Assignee
MITSUBISHI GAS CHEMICAL COMPANY, INC.
5-2, MARUNOUCHI 2-CHOME, CHIYODA-KU, TOKYO, 100-8324, JAPAN
Covered Property
(1)
Material for Forming Underlayer Film for Lithography, Composition for Forming Underlayer Film for Lithography, Underlayer Film for Lithography and Pattern Forming Method