Patent Assignment
Reel/Frame 044757/0334
Assignment of Assignor's Interest
Recorded: 2018-01-29
Pages: 4
Assignors
SEKI, MASAYA
Executed: 2015-04-14
TOGAWA, TETSUJI
Executed: 2015-04-23
ITO, KENYA
Executed: 2015-04-23
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Polishing Apparatus and Polishing Method