Patent Assignment
Reel/Frame 044878/0786
Assignment of Assignor's Interest
Recorded: 2018-02-09
Pages: 2
Assignor
BOGNER, BERNHARD
Executed: 2018-01-18
Assignee
SUSS MICROTEC LITHOGRAPHY GMBH
SCHLEISSHEIMER STRASSE 90, GARCHING BEI MUENCHEN, 85748, GERMANY
Covered Property
(1)
Suction Apparatus for an End Effector, End Effector for Holding Substrates and Method of Producing an End Effector