Patent Assignment
Reel/Frame 044930/0450
Assignment of Assignor's Interest
Recorded: 2018-02-14
Pages: 5
Assignor
ABE, TAKAHIRO
Executed: 2018-02-05
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing System and Substrate Transfer Method