Patent Assignment
Reel/Frame 045032/0189
Assignment of Assignor's Interest
Recorded: 2018-01-10
Pages: 5
Assignors
LI, JIANHENG
Executed: 2018-01-09
VRTIS, RAYMOND NICHOLAS
Executed: 2018-01-10
RIDGEWAY, ROBERT GORDON
Executed: 2018-01-10
XIAO, MANCHAO
Executed: 2017-09-25
LEI, XINJIAN
Executed: 2017-09-25
Assignee
VERSUM MATERIALS US, LLC
8555 SOUTH RIVER PARKWAY, PATENT DEPT., TEMPE, ARIZONA, 85284
Covered Property
(1)
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features